Electrode patterning for a differential PZT activator
US6716363B1 · kind B1 · utility
25Cited by
22References
18Claims
0Family size
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Key dates
| Filing date | Jan 14, 2002 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Jan 14, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
Abstract
A process for fabricating piezoelectric elements each having a wrap-around electrode to be used in a differential actuator design where electrical connection is made to the bottom electrode of the element from the top surface of the element. The wrap-around electrode is formed during the creation of the elements instead of on an element by element basis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.