Mask plate with lobed aperture
US6717138B2 · kind B2 · utility
1Cited by
7References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2002 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Nov 13, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/06
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for removing neutral noise from a quadrupole mass filter ion beam. A mask plate has a lobed aperture centered on a longitudinal axis and positioned between a quadrupole mass filter exit end and an ion detector. The mask plate operates to remove neutral atoms from the ion beam that may interfere with instrument sensitivities. The lobed aperture passes the ion beam with little loss of the ion beam intensity. The invention substantially maintains signal intensity and removes unwanted noise from a mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.