Method and apparatus for actuation of a two-axis MEMS device using three actuation elements
US6717325B2 · kind B2 · utility
7Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2002 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Mar 9, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.