Single axis manipulator with controlled compliance
US6717432B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2002 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Jun 17, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor test system that includes a tester, a material handling unit and a manipulator that positions the tester relative to the material handling unit. The manipulator is in the form of a cart that can be wheeled to the material handling unit. The cart is attached to the mateiral handling unit to provide course positioning of the tester relative to the handling unit. Major motion of the test head is constrained to an axis perpendicular to the mating interface of the material handling unit. However, compliant motion, with up to six degrees of freedom, is possible in a complaint zone near the handler. In this way, alignment units on the tester and material handling unit can accurately control the final positioning of the tester relative to the material handling unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.