Pulse width modulation drive signal for a MEMS gyroscope
US6718823B2 · kind B2 · utility
22Cited by
19References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 30, 2002 |
| Grant date | Apr 13, 2004 |
| Priority date | — |
| Expiry date | Jun 5, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS gyroscope may be coupled to drive electronics that provide a pulse width modulation drive signal to the MEMS gyroscope. The pulse width modulation drive signal may be generated by comparing a pickoff signal and/or input signal to a direct current threshold level.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.