Methods and systems for reducing stick-down within MEMS structures
US6718825B1 · kind B1 · utility
4Cited by
28References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2003 |
| Grant date | Apr 13, 2004 |
| Priority date | — |
| Expiry date | Jan 17, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for reduces the sticking of proof masses in micro-electromechanical systems (MEMS) devices to sense plates in the MEMS device due to acceleration forces to which the MEMS device is subjected. The method includes determining a beginning of acceleration events which would cause proof masses to contact sense plates, reducing sense bias voltages to the sense plates, determining an end of the acceleration event, and increasing sense bias voltages to their former levels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.