Patent · US Expired

System and method for automatically inspecting an array of periodic elements

US6720989B2 · kind B2 · utility

1Cited by
12References
39Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 5, 2000
Grant dateApr 13, 2004
Priority date
Expiry dateNov 30, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30121
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention relates to a system and method for scanning electronically acquired periodic images from an object and thereafter, inspecting the periodic images by using predetermined rules. The method to inspect the image includes an algorithm for analyzing the periodic patterns of the image and detecting deviations from numerical acceptance norms. In the system, the field of view of a camera, such as a video camera, viewing the object includes a two-dimensional image of the object. The camera captures the two-dimensional image of the object and converts the image into an array of scan lines, whereby each scan line represents a one-dimensional “slice” of target shape of the object. Hence, while all two dimensional images do not have periodic pattern, the array of scan lines represents a periodic pattern that is used by the algorithm in the inventive system. Alternatively, the camera may capture a scan line of a one-dimensional image with period elements, whereby the scan line represents a one-dimensional slice of target shape. Each slice is broken down into “segments” consisting of sets of adjacent pixels that are similar in brightness, hue, or both.…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.