System and method for automatically generating semiconductor equipment communication standard (SECS) message source in SECS communication
US6721618B2 · kind B2 · utility
7Cited by
4References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2002 |
| Grant date | Apr 13, 2004 |
| Priority date | — |
| Expiry date | Sep 18, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04Q2213/13322
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system and method for automatically generating software such that coding of a source program for use in controlling equipments may be automatically performed to the selection of data corresponding to a SECS message defining operations of the semiconductor fabricating equipments in the SECS message communications for a semiconductor fabricating or processing system. According to the present invention, it is possible to rapidly automate the equipment and perform ease maintenance and repair of the fabricating equipments and provide a more static environment for fabricating the semiconductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.