Coordinate transformation system for semiconductor device, coordinate transformation method and coordinate transformation program
US6721935B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 5, 2002 |
| Grant date | Apr 13, 2004 |
| Priority date | — |
| Expiry date | Apr 5, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C2029/5604
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A coordinate transformation system includes: a layout display unit configured to obtain an arbitrary point in layout data of a semiconductor device as a coordinate value of an FBM physical coordinate system indicative of a physical position; a pattern defining unit configured to define the relationship between an FBM physical address and the FBM physical coordinates using a pattern tree obtained by combining an array pattern, defining lining direction, interval, and the number of components to be disposed at equal intervals, with a random pattern, defining the relationship between the FBM physical address as a coordinate system of FBM data indicative of an electric failure position obtained by a test process of the semiconductor device and the FBM physical coordinates in a one-to-one corresponding manner; and a program generating unit configured to generate a program to transform the FBM physical address into the FBM physical coordinates from the pattern defined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.