Apparatus and method for ultrasensitive nanoelectromechanical mass detection
US6722200B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2002 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | May 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to the application of the techniques of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. A pulsed flux of atoms is adsorbed onto the surface of a 32.8 MHz nanomechanical resonator within an ultrahigh vacuum environment. The mass-induced frequency shifts from these adsorbates are then used to demonstrate a mass sensitivity of ˜1.46×106 Daltons (Da). For resonators operating up to frequencies of 72 MHz, inverse mass responsivities as small as ˜8×10−20 grams/Hz (5×104 Da/Hz) are obtained. Our results offer a new approach to ultrahigh resolution mass spectrometry of individual, electrically-neutral macromolecules with clear prospects for single Dalton sensitivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.