Manipulator apparatus with low-cost compliance
US6722215B2 · kind B2 · utility
5Cited by
11References
8Claims
0Family size
Inventors
Key dates
| Filing date | Jun 18, 2002 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Jun 18, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A compliance assembly is disclosed for use in a semiconductor tester testhead stand. The compliance assembly includes an airspring having compliance along a plurality of axes and a containment vessel adapted for receiving the airspring. The containment vessel includes walls that, when the airspring is loaded, control the compliance along the plurality of axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.