One-piece cleaning tank with indium bonded megasonic transducer
US6722379B2 · kind B2 · utility
3Cited by
32References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2001 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Apr 23, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A megasonic cleaning system comprised of a one-piece cleaning tank, one or more piezoelectric crystals and an indium layer for attaching the piezoelectric crystals to the cleaning tank. The tank comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, ceramics and stainless steel. The piezoelectric crystals are attached directly to a side or to the bottom of the tank.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.