System for validating and monitoring semiconductor testing tools
US6724211B2 · kind B2 · utility
1Cited by
5References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2001 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Sep 12, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F11/2294
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system for monitoring semiconductor testing tools comprises a tester testing a semiconductor device, whereby a test result is derived, a storage device storing a logic function corresponding to the semiconductor device, and a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.