Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices
US6724516B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2002 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Feb 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . , etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.