Silicon oxide particles
US6726990B1 · kind B1 · utility
24Cited by
38References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 1998 |
| Grant date | Apr 27, 2004 |
| Priority date | — |
| Expiry date | May 27, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2982
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A collection of silicon oxide nanoparticles have an average diameter from about 5 nm to about 100 nm. The collection of silicon oxide nanoparticles effectively include no particles with a diameter greater than about four times the average diameter. The particles generally have a spherical morphology. Methods for producing the nanoparticles involve laser pyrolysis. The silicon oxide nanoparticles are effective for the production of improved polishing compositions including compositions useful for chemical-mechanical polishing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.