Power splitter for plasma device
US6727656B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 18, 2002 |
| Grant date | Apr 27, 2004 |
| Priority date | — |
| Expiry date | Jun 18, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P5/16
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention concerns a system including a microwave generator and a rectangular guide connected with the generator. The system is adapted to operate in fundamental (H10) or transverse electrical (TE10) mode, and associated with means providing a standing wave pattern. The system also includes many power connectors arranged in the guide at zones of maximum amplitude for one of the components of the electromagnetic field for splitting the generator power. The power connectors are adjusted so that the sum of their reduced admittance levels brought to the splitter input formed by the guide is in a single unit and many sources, respectively connected to a connector of the guide, via insulating means ensuring a power transmission of the connector to the source without reflecting towards the connector and a device adapting impedance of each source, located downstream of the insulating means, between the latter and associated source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.