Surface control alloy substrates and methods of manufacture therefor
US6730410B1 · kind B1 · utility
18Cited by
32References
18Claims
0Family size
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Inventors
Key dates
| Filing date | Jul 14, 2000 |
| Grant date | May 4, 2004 |
| Priority date | — |
| Expiry date | Oct 2, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S428/93
Abstract
Methods and articles for controlling the surface of an alloy substrate for deposition of an epitaxial layer. The invention includes the use of an intermediate layer to stabilize the substrate surface against oxidation for subsequent deposition of an epitaxial layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.