Patent · US Expired

Surface control alloy substrates and methods of manufacture therefor

US6730410B1 · kind B1 · utility

18Cited by
32References
18Claims
0Family size

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Key dates

Filing dateJul 14, 2000
Grant dateMay 4, 2004
Priority date
Expiry dateOct 2, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S428/93

Abstract

Methods and articles for controlling the surface of an alloy substrate for deposition of an epitaxial layer. The invention includes the use of an intermediate layer to stabilize the substrate surface against oxidation for subsequent deposition of an epitaxial layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.