Cleaning solution for substrates of electronic materials
US6730644B1 · kind B1 · utility
22Cited by
16References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2000 |
| Grant date | May 4, 2004 |
| Priority date | — |
| Expiry date | Apr 17, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/122
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The present invention relates to a cleaning solution capable of removing efficiently at the same time particles and metallic impurities from a substrate surface without corroding metallic materials.The cleaning solution for cleaning substrates of electronic materials comprises an organic acid compound and at least one selected from the group consisting of dispersants and surfactants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.