Dynamic structural coupling mechanism for reducing optical degradation in vibrating environments
US6731327B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 24, 1999 |
| Grant date | May 4, 2004 |
| Priority date | — |
| Expiry date | Mar 24, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/24
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Vibration damping apparatus for vibrating environment such as a light emission microscope and an integrated circuit test head includes a rigid member with remotely controlled clamping apparatus attached to spaced portions of the member. The clamping apparatus engage the microscope and the test head for reducing vibrations, and the clamping apparatus can be readily deactivated for moving the microscope or the test head for alignment purposes. Advantageously, two or more rigid members including pneumatic cylinders can be positioned around the device under test while permitting the use of mechanical probes for engaging nodes of an integrated circuit for test purposes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.