Optical integrator for an illumination device

US6733165B2 · kind B2 · utility

Assignee

• Carl Zeiss Semiconductor Manufacturing Technologies AG · DE

Inventors

• Sijbe Abraham Van Der Lei · Veldhoven, NL
• Marnix Aldert Tas · Eindhoven, NL
• Jan Hoegee · Delft, NL
• Paul Van Der Veen · Waalre, NL
• Jess Koehler · Markdorf, DE
• Johannes Wangler · Oberkochen, DE

Key dates

• Filing date: Dec 20, 2001
• Grant date: May 11, 2004
• Expiry date: Dec 20, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S385/901
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical integrator for an illumination device of a microlithographic projection exposure system has a rod made of a material transparent for ultraviolet light and with a rectangular cross-section. A rod arrangement with, for example, seven small rods made of the same material is arranged before the entrance surface of the rod. The aspect ratio between width and height of the small rods is the inverse of the aspect ratio between width and height of the rod. The rod arrangement, or some analogous structure, surface or treatment substituted therefor, serves to compensate the direction-dependent total reflection losses of the rod.