Filter unit, chemical liquid supply system, and chemical liquid supply method
US6733250B2 · kind B2 · utility
22Cited by
9References
31Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 21, 2001 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Jul 1, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2313/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A filter unit in which a solution storage chamber for storing a chemical liquid supplied from a solution tank and a filter material housing chamber for filtering the chemical liquid in the solution storage chamber by a filter to supply the chemical liquid to a pump are integrally formed is integrally arranged together with the pump. An exhaust path for exhausting air in a solution guide path for causing the solution storage chamber to communicate with the solution tank and the solution storage chamber, and a pump inlet-side path for causing the filter material housing chamber to communicate with the pump are arranged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.