Method for forming an optical component
US6733821B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2000 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Oct 16, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/562
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for forming an optical component includes (i) depositing optical layers on a base, and (ii) controlling a thickness of a tuning layer by (a) depositing the tuning layer on the optical layers, (b) measuring a first optical characteristic, (c) measuring a second optical characteristic after continued deposition of the tuning layer, (d) determining whether the second optical characteristic has decreased compared to the first optical characteristic, (e) when the second optical characteristic has not decreased, continuing deposition of the tuning layer and returning to steps (ii)(b)-(e), when the second optical characteristic has decreased, terminating the depositing and removing a portion of the tuning layer formed during a period of time defined from when an increase/decrease of the second optical characteristic is stopped to when the second optical characteristic is changed to be decreased, and (f) adding a layer of a lower refractive index on the tuning layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.