Method and device for producing solar cells

US6734037B1 · kind B1 · utility

Assignees

• Universität Konstanz · DE
• Centrotherm Elektrische Anlagen GmbH & Co. · DE

Inventors

• Peter Fath · Ilsenburg, DE
• Markus Spiegel · Konstanz, DE
• Thomas Pernau · Bad Dürrheim, DE
• Gernot Wandel · Blaubeuren, DE
• Rainer Moller · Meyzieu, FR
• Johann George Reichart · Blaubeuren, DE

Key dates

• Filing date: Sep 26, 2002
• Grant date: May 11, 2004
• Expiry date: Sep 26, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/958

Abstract

The present invention concerns a process for fabricating a solar cell, wherein material is deposited on a multicrystalline silicon substrate and passivation is performed by means of hydrogen plasma. It is proposed that the material be deposited by low-pressure CVD and the hydrogen passivation be effected by feeding in a hydrogen plasma induced remotely from the partially processed solar cells. A device for carrying out the process is also described.