Method for fabricating electrode device
US6734087B2 · kind B2 · utility
14Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2002 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Nov 6, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30469
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrode device for an electric field emission electron source suitable for duty drive having an element size of 50 &mgr;m or smaller and an electrode device fabricating method. A glass film used as catalyst of forming carbon nanotubes is formed on a substrate to form metal catalyst at nano meter level and control dispersion. Carbon nanotubes are dispersively formed on the metal catalyst and a metal coat is formed on the surface of carbon nanotubes to improve electric pulse response characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.