Dry surface cleaning apparatus
US6734388B2 · kind B2 · utility
3Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2002 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | May 22, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2101/40
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A dry surface cleaning apparatus removes surface contaminants on a surface of a workpiece. The dry surface cleaning apparatus has a laser for generating a laser beam, a sealed chamber for holding the workpiece therein, wherein the sealed chamber has a transparent window through which the laser beam is transmitted, and a laser focusing lens for converging the laser beam on a laser focus around the surface of the workpiece to generate a plasma shock wave around the laser focus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.