Patent · US Expired

Discharge vessel with excimer fill, and associated discharge lamp

US6734629B2 · kind B2 · utility

3Cited by
10References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 30, 2002
Grant dateMay 11, 2004
Priority date
Expiry dateJul 30, 2022

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC03C2218/111
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A discharge vessel with an excimer fill comprises a cap, electrodes and a fill having at least one noble gas and a halogen, which, when the lamp is operating, together form an excimer, the discharge vessel being manufactured from quartz glass. The inner wall of the discharge vessel is completely covered with a passivation layer of a metal oxide of the metals Al, Hf, Y or Sc or the mixed oxides thereof, the layer having an amorphous structure and its layer thickness being 20 to 200 nm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.