Prober for testing light-emitting devices on a wafer
US6734959B2 · kind B2 · utility
10Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2002 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Sep 14, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2001/4252
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A prober for measuring the light output of digital devices integrally formed on a single wafer. The prober includes a light-integrating sphere sequentially aligned with selected devices. Each time that a device is aligned with the sphere, the device aligned with the sphere is activated, so that the light output of each device is individually measured. In the disclosed embodiment, the devices are vertical cavity surface emitting lasers (VCSELs) and light emitting diodes (LEDs).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.