Cartesian scanning system
US6735005B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2002 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | May 29, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Cartesian scanning system for scanning a surface of a sample. The scanning system includes a light source assembly configured to produce at least one collimated beam of light, a light sensing system, a stage configured for mounting the sample thereon and a linear track having a direction of elongation. The linear track and the stage are configured to move relative to each other. The scanning system also includes a scanning head having a reflecting system which is configured to direct the collimated beam of light onto the surface and to direct a beam of light reflected from the surface to the light sensing system. The scanning head is slidably associated with the linear track so as to be moveable in a direction parallel to a direction of elongation of the linear track. Also included are a position determination system and a scan displacement correction system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.