Recipe management system
US6735493B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2002 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Oct 21, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S707/99954
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A recipe management system is provided including a processor configured to receive a first job file for a processing tool through a network, said first job file including a master job file for said processing tool. The processor also receives a second job file through the network from a host processor associated with the processing tool. The processor compares the first and second job files, wherein the processor determines whether the first and second job files differ. A semiconductor manufacturing method is also provided. A first job file including a master job file for a processing tool is received through a network. A second job file is also received through the network from a host processor associate with the processing tool The job files are then compared to determine whether the first and second job files differ.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.