Method for forming an electro-mechanical device
US6735854B1 · kind B1 · utility
2Cited by
7References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2000 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Jan 31, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Described are various improved methods of forming stable metallization for electronic devices, electromechanical devices, force-sensing devices and accelerometers. Also described are various improved electronic devices, electromechanical devices, force-sensing devices, and accelerometers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.