Stable glow discharge detector
US6736000B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2001 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Nov 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2030/642
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A highly sensitive electronic ion cell for the measurement of trace elements in He carrier gas which involves glow discharge. A constant wave (CW) stable glow discharge detector which is controlled through a biased resistor, can detect the change of electron density caused by impurities in the He carrier gas by many orders of magnitude larger than that caused by direct ionization or electron capture. The stable glow discharge detector utilizes a floating pseudo-electrode to form a probe in or near the plasma and a solid rod electrode. By using this probe, the large variation of electron density due to trace amounts of impurities can be directly measured. The solid rod electrode provides greater stability and thus easier alignment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.