Patent · US Expired

Stable glow discharge detector

US6736000B2 · kind B2 · utility

2Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 15, 2001
Grant dateMay 18, 2004
Priority date
Expiry dateNov 15, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2030/642
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A highly sensitive electronic ion cell for the measurement of trace elements in He carrier gas which involves glow discharge. A constant wave (CW) stable glow discharge detector which is controlled through a biased resistor, can detect the change of electron density caused by impurities in the He carrier gas by many orders of magnitude larger than that caused by direct ionization or electron capture. The stable glow discharge detector utilizes a floating pseudo-electrode to form a probe in or near the plasma and a solid rod electrode. By using this probe, the large variation of electron density due to trace amounts of impurities can be directly measured. The solid rod electrode provides greater stability and thus easier alignment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.