Prognostic health monitoring of fluidic systems using MEMS technology
US6736980B2 · kind B2 · utility
39Cited by
18References
33Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 27, 2002 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Sep 27, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2201/54
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention is directed to a filter module that may incorporate sensors to measure various characteristics of fluid flow and filtration. The sensors may be MEMS and may measure the temperature, flow rate, pressure, etc. of the fluid. Sensor measurements may be used to determine the occurrence of harmful events, such as cavitation or particle breakthrough, or to predict the remaining service life of a filter element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.