Precision optical alignment system
US6737664B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2002 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Oct 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S7/4972
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical alignment system for controlling the position of a laser beam through an optical train. The optical alignment system includes a semiconductor laser source for the generation of an alignment beam, and a beam steering device to manipulate the position of the alignment beam on a multi-element detector. The semiconductor laser is driven to mode hop at a frequency greater than the upper frequency limit of the multi-element detector. Driving the semiconductor laser to mode hop at a frequency greater than the upper frequency limit of the multi-element detector results in a more uniform alignment beam as seen by the detector, as the alignment beam becomes an average of all the operational modes of the semiconductor laser. A more uniform alignment beam results in improved accuracy of the alignment system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.