Method for examining a specimen
US6738190B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 5, 2001 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Aug 1, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for examining a specimen (11) by means of a confocal scanning microscope having at least one light source (1), preferably a laser, to generate an illuminating light beam (4) for the specimen (11), and a beam deflection device (9) to guide the illuminating light beam (4) over the specimen (11) comprises the following method steps: Firstly a preview image is acquired. Then at least one region of interest in the preview image is marked. This is followed by allocation of individual illuminating light beam wavelengths and/or illuminating light beam power levels to the region or regions. Illumination of the region or regions of the specimen (11) in accordance with the allocation is then accomplished. Lastly, the reflected and/or fluorescent light proceeding from the specimen (11) is detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.