Optical waveguide circuit including multiple passive optical waveguide devices, and method of making same
US6738546B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 15, 2002 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Sep 5, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/20
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide device includes a first passive optical waveguide device and a second passive optical waveguide device. The first passive optical waveguide device is etched, at least in part, in a semiconductor layer of a wafer. The value and position of an effective mode index within the first passive optical waveguide device remains substantially unchanged over time. The second passive optical waveguide device is formed at least in part from a polysilicon layer deposited above an unetched portion of the semiconductor layer. The effective mode index of a region of static effective mode index within the optical waveguide is created by the polysilicon layer of the second passive optical waveguide device. The value and position of the effective mode index within the region of static effective mode index remains substantially unchanged over time. The optical waveguide forms at least a part of both the first passive optical waveguide device and the second passive optical waveguide device. The optical waveguide couples the first passive optical waveguide device and the second passive optical waveguide device, and the optical waveguide is formed at least in part using the semiconduc…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.