Patent · US Expired

Electric supply unit and method for reducing arcing during sputtering

US6740207B2 · kind B2 · utility

23Cited by

4References

33Claims

0Family size

Assignee

Unaxis Deutschland GmbH · DE

Inventors

Andreas Kloeppel · Glauburg, DE
Christoph Daube · Alzenau, DE
Johannes Stollenwerk · Gelnhausen, DE
Thomas Linz · Grenchen, CH

Key dates

Filing date	Mar 28, 2002
Grant date	May 25, 2004
Priority date	—
Expiry date	Mar 28, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/34
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Sparking is suppressed during high-frequency sputtering by a high-frequency generator (5) which has a controlled switching unit (13) that is connected upstream in relation to the output of the generator. A high-frequency supply signal that is generated at the output of the high-frequency generator is stopped for plasma discharge (PL) for a short time, by the switching unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.