Optical translation measurement
US6741335B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2002 |
| Grant date | May 25, 2004 |
| Priority date | — |
| Expiry date | Jul 19, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F3/0312
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining the relative motion of a surface with respect to a measurement device including placing a partially transmitting object, which is part of the measuring device, adjacent to the surface; illuminating the surface with incident illumination, which does not constitute an interference pattern, such that the illumination is reflected from portions of the surface, wherein at least part of at least one of the incident and reflected illumination passes through the object; detecting the illumination reflected from the surface, and generating a detected signal; and determining the relative motion of the surface parallel to the surface, from the detected signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.