Technique for measuring small distances between, and for measuring the flatness of, electrically conductive surfaces
US6742380B2 · kind B2 · utility
4Cited by
14References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 27, 2001 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Dec 23, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/345
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for measuring the distance between first and second proximately disposed electrically conductive surfaces is provided in which the force exerted between the first and second surfaces is measured to obtain an exerted force value. A separation distance between the first and second surfaces is determined as a function of the exerted force value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.