Angular velocity sensor
US6742390B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2003 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Jan 10, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular velocity sensor includes four mass members which are connected by retaining beams, and the retaining beams are fixed to a substrate at node portions which correspond to nodes of the retaining beams when the mass members vibrate such that two adjacent mass members are in opposite phases. The mass members vibrate in an X-axis direction while the overall center of gravity is maintained at an approximately constant position. Two mass members disposed at the central region move in a Y-axis direction in accordance with an angular velocity about a Z axis, and the angular velocity is detected on the basis of the displacements thereof. The mass members vibrate in a stable vibrational state and dimensional errors or other problems, are compensated for by their shapes that are symmetric to each other in the Y-axis direction. Accordingly, the detection accuracy and reliability of the sensor are improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.