Method and apparatus for dispensing fluids
US6742993B2 · kind B2 · utility
51Cited by
35References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 11, 2002 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Nov 11, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/551
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.