Multi-layer burner module, adapter, and assembly therefor
US6743011B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2001 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Mar 3, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF23D2900/21005
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A burner module for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process includes a plurality of substantially planar layers. The substantially planar layers are arranged in a generally parallel and fixed relationship and define an inlet, an outlet and a passage fluidly connecting the inlet and outlet. At least one of the layers is a distribution layer having a plurality of apertures therethrough and fluidly communicating with the passage. The plurality of apertures collectively define a non-uniform pattern arranged and configured to improve the uniformity of a flow out through the outlet. Burner adapter and assembly embodiments are also included.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.