Desorption processing for flat panel display
US6743068B2 · kind B2 · utility
0Cited by
9References
5Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 31, 2001 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Jun 28, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/39
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
By desorption processing of a flat panel display in a vacuum before hermetic sealing, it is possible to reduce operational outgassing. The first embodiment involves plasma scrubbing, the second embodiment involves electron irradiation pre-aging, and the third embodiment involves electron irradiation pre-aging of the faceplate in an evacuation process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.