Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices
US6743570B2 · kind B2 · utility
54Cited by
1References
20Claims
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Key dates
| Filing date | May 24, 2002 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Jul 27, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/143
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A polycarbonate polymer such as poly(cyclohexene carbonate) acts as a positive electron beam resist, is substantially transparent to ultra violet light and that depolymerizes when heated. The polymer acts as a positive electron beam resist at 5 kV, and depolymerizes at temperatures between approximately 200-300° C. The polymer is removable from underneath other layers by heating, facilitating fabrication of overhanging structures such as tubes by depositing layers on top of the polymer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.