Optical waveguide probe and manufacturing method of the same, and scanning near-field optical microscope
US6744030B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2001 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Nov 12, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/862
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical waveguide probe is disclosed which is used for a scanning near-field optical microscope, has a low light propagation loss, and is capable of performing an AFM operation, and a manufacturing method thereof is disclosed. The vicinity of the tip of an optical waveguide 2 is bent toward a side of a probe portion 9 through a plurality of surfaces symmetrical with respect to a plane including an optical axis of the optical waveguide 2. By this, a loss of a propagated light 7 at a bent portion 10 is reduced, and the propagated light 7 can be condensed to a minute aperture 5, so that near-field light can be efficiently emitted from the minute aperture 5.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.