Frequency sensitivity analysis and optimum design for MEMS resonator
US6744174B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2002 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Apr 2, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H3/0075
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A frequency stability analysis and design method for frequency robust resonators, such as MEMS resonators, is presented. The frequency characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on the sidewall of the structure being considered, the first and second order frequency sensitivities to the fabrication error are derived. A relationship between the proof mass area and perimeter, and the beam width, is developed for single material structures, which expresses that the proof mass perimeter times the beam width should equal six times the area of the proof mass. Design examples are given for the single material and multi-layer structures. The results and principles presented in the paper can be used to analyze and design other MEMS resonators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.