Mount for an optical element in an optical imaging device

US6744574B2 · kind B2 · utility

Assignee

• Carl Zeiss Semiconductor Manufacturing Technologies AG · DE

Inventors

• Ulrich Weber · Ulm, DE
• Jochen Becker · Oberkochen, DE
• Hubert Holderer · Oberkochen, DE
• Bernhard Gellrich · Aalen, DE
• Jens Kugler · Heubach, DE

Key dates

• Filing date: Sep 20, 2002
• Grant date: Jun 1, 2004
• Expiry date: Oct 21, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B7/02
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A mount for an optical element in an optical imaging device, in particular in a lens system (4) for semiconductor lithography, has at least one mounting ring (2) which bears the optical element (6). The mounting ring (2) is of at least partially hollow design in cross section.