Electrostatic chucks with flat film electrode
US6744618B2 · kind B2 · utility
10Cited by
32References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2000 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Aug 26, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck having an essentially flat film electrode which is essentially parallel to the chucking surface of the electrostatic chuck is fabricated by depositing a film electrode, preferably by screen printing, onto a surface of a sintered ceramic substrate. A green ceramic layer is formed or molded onto the film electrode and the resulting structure is sintered, thereby producing the electrostatic chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.