Wafer cassette equipped with piezoelectric sensors
US6745901B2 · kind B2 · utility
8Cited by
4References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2001 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Feb 21, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S206/832
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer cassette for storing and transporting wafers that is equipped with sensors such as piezoelectric sensors or capacitance sensors on the surface of the dividers for sensing the presence or absence of wafers positioned on top of the dividers is described. The sensors are capable of detecting any defective placement of wafers such as a cross-slot placement or a double placement such that the condition can be corrected by a machine operator and a wafer cassette can be stopped before it is loaded into an internal buffer of a process machine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.