Uniform thin films produced by magnetorheological finishing
US6746310B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 6, 2002 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Aug 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An improved method for producing a thin layer having highly uniform thickness, which layer may be pre-coated on an undulating surface of a substrate element. A working layer of the material is formed having a thickness greater than the final thickness desired. An areal (XY) determination of working layer thickness is made by ellipsometry, laser interferometry, or x-ray diffraction, or other known means. A map of thicknesses to be removed from the free surface of the working layer is entered into the control system of a magnetorheological finishing apparatus. The working layer is mounted on a workpiece holder of the apparatus and correctly indexed to the machine. The machine then removes material by magnetorheological finishing as instructed by the control system to leave a residual layer having a very high degree of thickness uniformity at a nominal average thickness and a very high surface integrity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.