Workpiece carrier with adjustable pressure zones and barriers
US6746318B2 · kind B2 · utility
12Cited by
19References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2001 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Jan 26, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier with adjustable pressure zones and adjustable barriers between zones for distributing the pressure on the backside of a wafer. The pressure zones may be created using an elastic web diaphragm. One or more grooves are formed in the surface of the diaphragm to relieve vacuum formed between the diaphragm and wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.